Hello world!

Chemical Beam Epitaxy and Related Techniques

Author: John S. Foord

Publisher: Wiley-Blackwell

ISBN: UOM:39015040616362

Category: Science

Page: 444

View: 866

Download Now →

Chemical Beam Epitaxy (CBE), is a powerful growth technique which has come to prominence over the last ten years. Together with the longer established molecular beam epitaxy (MBE) and metal organic vapour phase epitaxy (MOVPE), CBE provides a capability for the epitaxial growth of semiconductor and other advanced materials with control at the atomic limit. This, the first book dedicated to CBE, and closely related techniques comprises chapters by leading research workers in the field and provides a detailed overview of the state-of-the-art in this area of semiconductor technology. Topics covered include equipment design and safety considerations, design of chemical precursors, surface chemistry and growth mechanisms, materials and devices from arsenide, phosphide, antimonide, silicon and II-VI compounds, doping, selected area epitaxy and etching. The volume provides an introduction for those new to the field and a detailed summary for experienced researchers.
Chemical Beam Epitaxy and Related Techniques
Language: en
Pages: 444
Authors: John S. Foord, G. J. Davies, W. T. Tsang
Categories: Science
Type: BOOK - Published: 1997-12-08 - Publisher: Wiley-Blackwell

Chemical Beam Epitaxy (CBE), is a powerful growth technique which has come to prominence over the last ten years. Together with the longer established molecular beam epitaxy (MBE) and metal organic vapour phase epitaxy (MOVPE), CBE provides a capability for the epitaxial growth of semiconductor and other advanced materials with
Chemical Beam Epitaxy and Related Growth Techniques
Language: en
Pages:
Authors: H. Heinecke, M. Ilegems, A. Rudra
Categories: Science
Type: BOOK - Published: 1998 - Publisher:

Books about Chemical Beam Epitaxy and Related Growth Techniques
Chemical Beam Epitaxy and Related Growth Techniques. Proceedings of the International Conference ; 3
Language: en
Pages:
Authors: H. Heinecke, M. Ilegems, A. Rudra
Categories: Science
Type: BOOK - Published: 1992 - Publisher:

Books about Chemical Beam Epitaxy and Related Growth Techniques. Proceedings of the International Conference ; 3
Chemical Beam Epitaxy and Related Growth Techniques. Proceedings of the International Conference ; 4
Language: en
Pages:
Authors: H. Heinecke, M. Ilegems, A. Rudra
Categories: Science
Type: BOOK - Published: 1993 - Publisher:

Books about Chemical Beam Epitaxy and Related Growth Techniques. Proceedings of the International Conference ; 4
Chemical Beam Epitaxy and Related Growth Techniques. Proceedings of the International Conference ; 2
Language: en
Pages:
Authors: H. Heinecke, M. Ilegems, A. Rudra
Categories: Science
Type: BOOK - Published: 1990 - Publisher:

Books about Chemical Beam Epitaxy and Related Growth Techniques. Proceedings of the International Conference ; 2